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The effect of ion-implantation on dopant diffusion in silicon during shallow-jun… (Book)

Formation of silicided, ultra-shallow junctions using low thermal budget process… (Book)

Analysis of partial junction solar cells (Massachusetts Institute of Technology.… (Book)

In vitro external factors influencing tight junctions and the accuracy of transe… (Book)
Alabama Academy of Science
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Ultra-shallow junction formation using silicide as a diffusion source and low th… (Book)
Center for Microelectronics
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The role of transient damage annealing in shallow junction formation (Technical … (Book)

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Flat-plate solar array project process development area process research of non-… (Book)
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Thermal budget issues for manufacturing deep submicron ULSI (Technical report) (Book)

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