Page TitleTransitioning fault detection into production
DescriptionMuch as an EKG shows the rhythm of a heart, the trace data of a tool can show the health of a tool. The data collected are values like pressure, temperature, and gas flow. Fault
Hyperlinkhttp://www.semiconductoronline.com/artic … n-0001?VNETCOOKIE=NO
7 more pages from the same domain (www.semiconductoronline.com) are linked
Page Tags
Trian
Linked From
Suggested3/2/2009 3:53:00 PM
Updated3/2/2009 3:53:00 PM